Compact space‑deployable cylindrical semiconductor facility for sub‑nanosecond Emitter‑Coupled Logic
Ø 2.5 m × 4 m cylindrical shell (fits a 4 m payload fairing).
< 6 t fully loaded — single ride on Falcon 9, Ariane 6 or LM 5B.
ISO Class 6 interior; positive N₂ purge; modular HEPA cassettes.
1 × dual‑arm cobot (ABB YuMi class) for wafer handling & cassette loading.
< 15 kW peak (process) / 4 kW idle — compatible with 10 kW solar array + battery.
| Step | Tool | Purpose |
|---|---|---|
| LOCOS isolation | RTP wet O₂ | 0.5 µm field oxide |
| Buried n⁺ layer | Ion implant + furnace | Reduce RC‑sheet |
| Epitaxial collector | RPCVD | 1.0 µm, 0.2 Ω cm |
| Base implant | Laser B pocket | 80 nm p‑box (box profile) |
| Emitter implant | RTP spike | 50 nm As activation |
| Metallisation | Al sputter | 1 µm single layer |